Structure and Vibrational Spectra of thin Films β-Ga<sub>2</sub>O<sub>3</sub>
<p><span>The structure, phase composition and surface morphology of thin films β-Ga<sub>2</sub>O<sub>3</sub></span><span>, obtained by high-frequency ion-plasma sputtering, after annealing at different atmosphere was inv...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Vasyl Stefanyk Precarpathian National University
2017-09-01
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| Series: | Фізика і хімія твердого тіла |
| Online Access: | http://journals.pu.if.ua/index.php/pcss/article/view/1234 |