Contour accuracy improvement of a flexure-based micro-motion stage for tracking repetitive trajectory
Flexure-based micro-motion mechanisms have been widely utilized in modern precision industry due to their inherent merits, while model uncertainty, uncertain nonlinearity, and cross-coupling effect will obviously deteriorate their contour accuracy, especially in the hig...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-01-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4973873 |