An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy

An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy

We present an electrostatic microelectromechanical systems (MEMS) resonant scanner with large out-of-plane translational stroke for fast axial-scanning in a multi-photon microscope system for real-time vertical cross-sectional imaging. The scanner has a compact footprint with dimensions of 2.1 mm ×...

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Bibliographic Details
Main Authors: Haijun Li, Xiyu Duan, Gaoming Li, Kenn R. Oldham, Thomas D. Wang
Format: Article
Language:English
Published: MDPI AG 2017-05-01
Series:Micromachines
Subjects:
MEMS scanner
axial scanning
multiphoton microscopy
Online Access:http://www.mdpi.com/2072-666X/8/5/159

Internet

http://www.mdpi.com/2072-666X/8/5/159

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