An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy

An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy

We present an electrostatic microelectromechanical systems (MEMS) resonant scanner with large out-of-plane translational stroke for fast axial-scanning in a multi-photon microscope system for real-time vertical cross-sectional imaging. The scanner has a compact footprint with dimensions of 2.1 mm ×...

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Main Authors: Haijun Li, Xiyu Duan, Gaoming Li, Kenn R. Oldham, Thomas D. Wang
Format: Article
Language:English
Published: MDPI AG 2017-05-01
Series:Micromachines
Subjects:
MEMS scanner
axial scanning
multiphoton microscopy
Online Access:http://www.mdpi.com/2072-666X/8/5/159
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spelling doaj-97db01dbcf51404ca7b8ca28220628462020-11-24T22:56:44ZengMDPI AGMicromachines2072-666X2017-05-018515910.3390/mi8050159mi8050159An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon MicroscopyHaijun Li0Xiyu Duan1Gaoming Li2Kenn R. Oldham3Thomas D. Wang4Department of Internal Medicine, University of Michigan, Ann Arbor, MI 48109, USADepartment of Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109, USADepartment of Internal Medicine, University of Michigan, Ann Arbor, MI 48109, USADepartment of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USADepartment of Internal Medicine, University of Michigan, Ann Arbor, MI 48109, USAWe present an electrostatic microelectromechanical systems (MEMS) resonant scanner with large out-of-plane translational stroke for fast axial-scanning in a multi-photon microscope system for real-time vertical cross-sectional imaging. The scanner has a compact footprint with dimensions of 2.1 mm × 2.1 mm × 0.44 mm, and employs a novel lever-based compliant mechanism to enable large vertical displacements of a reflective mirror with slight tilt angles. Test results show that by using parametrical resonance, the scanner can provide a fast out-of-plane translational motion with ≥400 μm displacement and ≤0.14° tilt angle over a wide frequency range of ~390 Hz at ambient pressure. By employing this MEMS translational scanner and a biaxial MEMS mirror for lateral scanning, vertical cross-sectional imaging with a beam axial-scanning range of 200 μm and a frame rate of ~5–10 Hz is enabled in a remote scan multi-photon fluorescence imaging system.http://www.mdpi.com/2072-666X/8/5/159MEMS scanneraxial scanningmultiphoton microscopy
collection DOAJ
language English
format Article
sources DOAJ
author Haijun Li
Xiyu Duan
Gaoming Li
Kenn R. Oldham
Thomas D. Wang
spellingShingle Haijun Li
Xiyu Duan
Gaoming Li
Kenn R. Oldham
Thomas D. Wang
An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
Micromachines
MEMS scanner
axial scanning
multiphoton microscopy
author_facet Haijun Li
Xiyu Duan
Gaoming Li
Kenn R. Oldham
Thomas D. Wang
author_sort Haijun Li
title An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
title_short An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
title_full An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
title_fullStr An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
title_full_unstemmed An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
title_sort electrostatic mems translational scanner with large out-of-plane stroke for remote axial-scanning in multi-photon microscopy
publisher MDPI AG
series Micromachines
issn 2072-666X
publishDate 2017-05-01
description We present an electrostatic microelectromechanical systems (MEMS) resonant scanner with large out-of-plane translational stroke for fast axial-scanning in a multi-photon microscope system for real-time vertical cross-sectional imaging. The scanner has a compact footprint with dimensions of 2.1 mm × 2.1 mm × 0.44 mm, and employs a novel lever-based compliant mechanism to enable large vertical displacements of a reflective mirror with slight tilt angles. Test results show that by using parametrical resonance, the scanner can provide a fast out-of-plane translational motion with ≥400 μm displacement and ≤0.14° tilt angle over a wide frequency range of ~390 Hz at ambient pressure. By employing this MEMS translational scanner and a biaxial MEMS mirror for lateral scanning, vertical cross-sectional imaging with a beam axial-scanning range of 200 μm and a frame rate of ~5–10 Hz is enabled in a remote scan multi-photon fluorescence imaging system.
topic MEMS scanner
axial scanning
multiphoton microscopy
url http://www.mdpi.com/2072-666X/8/5/159
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