An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
We present an electrostatic microelectromechanical systems (MEMS) resonant scanner with large out-of-plane translational stroke for fast axial-scanning in a multi-photon microscope system for real-time vertical cross-sectional imaging. The scanner has a compact footprint with dimensions of 2.1 mm ×...
Main Authors: | Haijun Li, Xiyu Duan, Gaoming Li, Kenn R. Oldham, Thomas D. Wang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-05-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/8/5/159 |
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