Study of oxidation processes in Mo/Be multilayers

Study of oxidation processes in Mo/Be multilayers

The results of an investigation on oxidation processes in Mo/Be multilayer nanofilms are presented. The films annealed both in ambient atmosphere and in vacuum. The extreme ultraviolet (EUV) and X-ray reflectivity of the samples at 11.34 and at 0.154 nm respectively were measured before and after th...

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Bibliographic Details
Main Authors: A. N. Nechay, N. I. Chkhalo, M. N. Drozdov, S. A. Garakhin, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, Yu. A. Vainer, E. Meltchakov, F. Delmotte
Format: Article
Language:English
Published: AIP Publishing LLC 2018-07-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5007008

Internet

http://dx.doi.org/10.1063/1.5007008

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