Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices

Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices

Single-crystalline magnesium oxide (MgO) is an attractive material of substrates for high-temperature devices and high-temperature superconducting films. However, it is difficult to achieve the direct bonding of MgO/MgO because of its high brittleness and hardness, as well as the weak bonding force...

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Bibliographic Details
Main Authors: Jia Liu, Pinggang Jia, Jiashun Li, Fei Feng, Ting Liang, Wenyi Liu, Jijun Xiong
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
MgO single crystal
direct bonding
surface activation
high temperature annealing
bonding interface
Online Access:https://ieeexplore.ieee.org/document/9057392/

Internet

https://ieeexplore.ieee.org/document/9057392/

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