Generating Silicon Nanofiber Clusters from Grinding Sludge by Millisecond Pulsed Laser Irradiation
Silicon nanofiber clusters were successfully generated by the irradiation of millisecond pulsed laser light on silicon sludge disposed from wafer back-grinding processes. It was found that the size, intensity, and growing speed of the laser-induced plume varied with the gas pressure, while the size...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-04-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/10/4/812 |