Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces
Modern optical engineering requires increasingly sophisticated interferometry methods capable of conducting subnanometer scale measurements of the large aperture, high-precision optical component surfaces. However, the accuracy of interferometry measurement is limited to the accuracy with which the...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2021-01-01
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| Series: | International Journal of Optics |
| Online Access: | http://dx.doi.org/10.1155/2021/6621939 |