High Sensitivity Flexible Capacitive Pressure Sensor Using Polydimethylsiloxane Elastomer Dielectric Layer Micro-Structured by 3-D Printed Mold
3-D printing is used to fabricate mold for micro-structuring the polydimethylsiloxane (PDMS) elastomeric dielectric layer in capacitive flexible pressure sensors. It is shown that, despite of the limited resolution of the used commercial 3-D printer for producing the mold, the fabricated sensor with...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7887687/ |