A normally-closed piezoelectric micro-valve with flexible stopper
In the field of controlled drug delivery system, there are still many problems on those reported micro-valves, such as the small opening height, unsatisfactory particle tolerance and high cost. To solve the above problems, a novel normally-closed piezoelectric micro-valve is presented in this paper....
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4947301 |