A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical...

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Bibliographic Details
Main Authors: Xiaoyang Zhang, Liang Zhou, Huikai Xie
Format: Article
Language:English
Published: MDPI AG 2015-12-01
Series:Micromachines
Subjects:
microelectromechanical systems (MEMS) mirror
electrothermal actuation
Cu/W bimorph
lateral-shift-free (LSF)
vertical scan
multimorph frame
large range
fast response
backside release
Online Access:http://www.mdpi.com/2072-666X/6/12/1460

Internet

http://www.mdpi.com/2072-666X/6/12/1460

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