Current Research Trends and the Need for Localization in Ultrapure Water Production Facilities in Semiconductor Industries
Objectives:This study aims to summarize the market status, patent applications, and technology trends for the production of ultrapure water in semiconductor industries. In addition, the potential of technological localization of ultrapure water production facility is reviewed in order to incubate do...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Korean Society of Environmental Engineers
2020-10-01
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| Series: | 대한환경공학회지 |
| Subjects: | |
| Online Access: | http://jksee.or.kr/journal/view.php?number=4283 |