Metal oxide semiconductor gas sensor self-test using Fourier-based impedance spectroscopy
For the self-test of semiconductor gas sensors, we combine two multi-signal processes: temperature-cycled operation (TCO) and electrical impedance spectroscopy (EIS). This combination allows one to discriminate between irreversible changes of the sensor, i.e., changes caused by poisoning, as well as...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2014-09-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | http://www.j-sens-sens-syst.net/3/213/2014/jsss-3-213-2014.pdf |