Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window

<b> </b>We fabricated transparent and flexible silicon oxycarbide (SiOC) hard coating (HC) films on a colorless polyimide substrate to use as cover window films for flexible and foldable displays using a reactive roll-to-roll (R2R) sputtering system at room temperature. At a SiOC thickne...

Full description

Bibliographic Details
Main Authors: Jin-Hyeok Park, Chan-Hwi Kim, Ju-Hyeon Lee, Han-Ki Kim
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/3/233