Lithium Niobate Micro-transducers matrix design
In this work, a two-dimensional (2D) Lithium Niobate (LiNbO3) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pa...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2019/30/matecconf_incer2019_01001.pdf |