Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate
A one-dimensional fluid/Monte Carlo hybrid model was used to quantitatively study the secondary electron effect on sustaining the discharge by examining the ionization induced by bulk electrons and secondary electrons under different external discharge parameters. The results indicate that as the vo...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-05-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5095997 |