Multilayer Nanoimprinting to Create Hierarchical Stamp Masters for Nanoimprinting of Optical Micro- and Nanostructures

Multilayer Nanoimprinting to Create Hierarchical Stamp Masters for Nanoimprinting of Optical Micro- and Nanostructures

Nanoimprinting is a well-established replication technology for optical elements, with the capability to replicate highly complex micro- and nanostructures. One of the main challenges, however, is the generation of the master structures necessary for stamp fabrication. We used UV-based Nanoimprint L...

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Bibliographic Details
Main Authors: Amiya R. Moharana, Helene M. Außerhuber, Tina Mitteramskogler, Michael J. Haslinger, Michael M. Mühlberger
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Coatings
Subjects:
nanoimprint lithography
uv-nil
reversal nil
liquid transfer imprint lithography
hierarchical structures
optical micro- and nanostructures
Online Access:https://www.mdpi.com/2079-6412/10/3/301

Internet

https://www.mdpi.com/2079-6412/10/3/301

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