Design, Fabrication, and Testing of a SOI-MEMS-Based Active Microprobe for Potential Cellular Force Sensing Applications
This paper presents the design, analysis, fabrication, and characterization of an electrostatically driven single-axis active probing device for the applications of cellular force sensing and materials characterization. The active microprobe is actuated by linear comb drivers to generate the motion...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2012-01-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1155/2012/785798 |