A Combined Thermo-Electrostatic MEMS-Based Switch with Low Actuation Voltage
Requirement of voltage up-converters due to high pull-in voltage is one of the main problems by merely electrostatic actuated MEMS-based Switches. Thermally actuated switches are another alternatives but with very high power dissipation. In this paper a low voltage switch is demonstrated, which uses...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2010-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2010/P_600.pdf |