Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

Ten picoseconds (200 kHz) ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photoni...

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Bibliographic Details
Main Authors: Lamia EL Fissi, Victor Xhurdebise, Laurent A. Francis
Format: Article
Language:English
Published: MDPI AG 2014-12-01
Series:Micromachines
Subjects:
picosecond
piezoelectric substrates
AT-cut quartz
Lithium Niobate
Lithium Tantalate
fluence
scan speed
scan number
laser ablation
Online Access:http://www.mdpi.com/2072-666X/6/1/19

Internet

http://www.mdpi.com/2072-666X/6/1/19

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