Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser
Ten picoseconds (200 kHz) ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photoni...
Main Authors: | Lamia EL Fissi, Victor Xhurdebise, Laurent A. Francis |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2014-12-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/6/1/19 |
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