On the Kinetics of Sol Gel Al:ZnO Thin Films Crystallization on Silicon Substrate
Recently, there is a growing interest in applying ZnO thin films on silicon buffer substrates for p-n junction devices, optical wave guide, etc. A sol gel process is very attractive technique for obtaining oxide thin films, due to easy control of film composition, easy fabrication of large area thi...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Galati University Press
2006-11-01
|
| Series: | The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science |
| Subjects: | |
| Online Access: | https://www.gup.ugal.ro/ugaljournals/index.php/mms/article/view/3199 |