Design and Characterization of In-Plane Piezoelectric Microactuators
In this paper, two different piezoelectric microactuator designs are studied. The corresponding devices were designed for optimal in-plane displacements and different high flexibilities, proven by electrical and optical characterization. Both actuators presented two dominant vibrational modes in the...
Main Authors: | , , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-06-01
|
Series: | Actuators |
Subjects: | |
Online Access: | http://www.mdpi.com/2076-0825/6/2/19 |