Design and Characterization of In-Plane Piezoelectric Microactuators

Design and Characterization of In-Plane Piezoelectric Microactuators

In this paper, two different piezoelectric microactuator designs are studied. The corresponding devices were designed for optimal in-plane displacements and different high flexibilities, proven by electrical and optical characterization. Both actuators presented two dominant vibrational modes in the...

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Bibliographic Details
Main Authors: Javier Toledo, Victor Ruiz-Díez, Alex Diaz-Molina, David Ruiz, Alberto Donoso, José Carlos Bellido, Elisabeth Wistrela, Martin Kucera, Ulrich Schmid, Jorge Hernando-García, José Luis Sánchez-Rojas
Format: Article
Language:English
Published: MDPI AG 2017-06-01
Series:Actuators
Subjects:
piezoelectric
AlN
microactuators
in-plane
electromechanical coefficient
stiffness coefficient
Online Access:http://www.mdpi.com/2076-0825/6/2/19

Internet

http://www.mdpi.com/2076-0825/6/2/19

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