Production of target cathodes from composite silicides for applying protective coatings using casting and deformation technologies
The article discusses the results of manufacturing multicomponent consumable cathodes of vacuum electric arc evaporation plants. To obtain ingots of complex silicide as a raw material for the manufacture of target cathodes, it is proposed to use induction melting of pure metal charge materials in an...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Belarusian National Technical University
2021-07-01
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Series: | Litʹë i Metallurgiâ |
Subjects: | |
Online Access: | https://lim.bntu.by/jour/article/view/3334 |