Investigation of Factors Affecting Sensitivity Enhancement of an Optical Fiber Probe for Microstructure Measurement Using Oblique Incident Light

Investigation of Factors Affecting Sensitivity Enhancement of an Optical Fiber Probe for Microstructure Measurement Using Oblique Incident Light

Recently, the demand for accuracy measurement of microstructures has been remarkable. We have been developing a measurement system for microstructures using a stylus made of an optical fiber and prisms. In this measurement system, the oblique irradiation of the laser beam was employed to detect the...

Full description

Bibliographic Details
Main Authors: Hiroshi Murakami, Akio Katsuki, Takao Sajima, Kosuke Uchiyama, Ichiro Yoshida, Yasuo Hamano, Hiroshi Honda
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Applied Sciences
Subjects:
measurement
microstructure
stylus
sensitivity
oblique incident light
Online Access:https://www.mdpi.com/2076-3417/10/9/3191

Internet

https://www.mdpi.com/2076-3417/10/9/3191

Similar Items