Fabrication Suspended High-Aspect-Ratio Parylene Structures for Large Displacement Requirements
A new method is presented for the fabrication of suspended parylene structures, using dry etching at low temperatures with a single standard silicon wafer. A silicon micro trench is used as a mold, in which parylene beams are fabricated through the deposition and removal of parylene in multiple stag...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA)
2014-05-01
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| Series: | International Journal of Automation and Smart Technology |
| Subjects: | |
| Online Access: | http://www.ausmt.org/index.php/AUSMT/article/view/343 |