Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers
This study investigates the microstructure, mechanical and electrical properties of dense yttrium oxyfluoride (YOF) coatings fabricated by the atmospheric plasma spraying technique. Transmission electron microscopy and X-ray diffraction analysis revealed a well crystallized YOF coating with preferre...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-10-01
|
| Series: | Coatings |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2079-6412/8/10/373 |