TOPICAL REVIEW: Optics of high-performance electron microscopes

TOPICAL REVIEW: Optics of high-performance electron microscopes

During recent years, the theory of charged particle optics together with advances in fabrication tolerances and experimental techniques has lead to very significant advances in high-performance electron microscopes. Here, we will describe which theoretical tools, inventions and designs have driven t...

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Bibliographic Details
Main Author: H H Rose
Format: Article
Language:English
Published: Taylor & Francis Group 2008-01-01
Series:Science and Technology of Advanced Materials
Subjects:
correction of aberrations
chromatic aberration
spherical aberration
hexapole corrector
ultracorrector
mirror corrector
aplanat
energy filter
eikonal method
Online Access:http://www.iop.org/EJ/abstract/1468-6996/9/1/014107

Internet

http://www.iop.org/EJ/abstract/1468-6996/9/1/014107

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