Amorphized length and variability in phase-change memory line cells

The dimensions of amorphized regions in phase-change memory cells are critical parameters to design devices for different applications. However, these dimensions are difficult to be determined by direct imaging. In this work, the length of amorphized regions in multiple identical Ge2Sb2Te5 (GST) lin...

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Bibliographic Details
Main Authors: Nafisa Noor, Sadid Muneer, Raihan Sayeed Khan, Anna Gorbenko, Helena Silva
Format: Article
Language:English
Published: Beilstein-Institut 2020-10-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.11.147