Single crystal diamond micro-disk resonators by focused ion beam milling
We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm × 3 mm × 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are micro-disks of few μm in diameter and less t...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-12-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/1.5051316 |