Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon

Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon

To study the magnetostriction of Co66Fe34 thin films, amorphous silicon microcantilevers were prepared by surface micromachining, and the 136 nm-thick magnetostrictive film was deposited by electron beam physical vapor deposition and patterned on top of the microcantilever structure. The magnetostri...

Full description

Bibliographic Details
Main Authors: Silveira B.M., Belo J.H., Pinto R., Silva J.A., Ferreira T.D., Pires A.L., Chu V., Conde J.P., Frazão O., Pereira A.M.
Format: Article
Language:English
Published: EDP Sciences 2020-01-01
Series:EPJ Web of Conferences
Subjects:
magnetostriction
thin films
micromechanical & nanomechanical oscillators
functional materials
evaporation
bending
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2020/09/epjconf_cmpnc2019_05003.pdf

Internet

https://www.epj-conferences.org/articles/epjconf/pdf/2020/09/epjconf_cmpnc2019_05003.pdf

Similar Items