Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by the structural electric potential energy, and gene...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/5/472 |