Investigation of Co-doped PZT films deposited by rf-magnetron sputtering
The focus of the present paper is to describe the preparation procedure and to investigate the microstructural characteristics and the electrical properties of Co-doped PZT films deposited by rf-sputtering by using a “mixture” target system onto Au-electroded Al2O3 ceramic substrates. The X-ray diff...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
University of Novi Sad
2014-09-01
|
| Series: | Processing and Application of Ceramics |
| Subjects: | |
| Online Access: | http://www.tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2025%2001.pdf |