Efficiency Enhanced Grating Coupler for Perfectly Vertical Fiber-to-Chip Coupling

Efficiency Enhanced Grating Coupler for Perfectly Vertical Fiber-to-Chip Coupling

In this work, a bidirectional grating coupler for perfectly vertical coupling is proposed. The coupling efficiency is enhanced using a silicon nitride (Si<sub>3</sub>N<sub>4</sub>) layer above a uniform grating. In the presence of Si<sub>3</sub>N<sub>4</s...

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Bibliographic Details
Main Authors: Zan Zhang, Xiaotao Shan, Beiju Huang, Zanyun Zhang, Chuantong Cheng, Bing Bai, Tianxi Gao, Xiaobo Xu, Lin Zhang, Hongda Chen
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Materials
Subjects:
silicon photonics
grating coupler
backside metal mirror
photonic integrated circuit
Online Access:https://www.mdpi.com/1996-1944/13/12/2681

Internet

https://www.mdpi.com/1996-1944/13/12/2681

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