Electrical and Optical Properties of Amorphous SnO<sub>2</sub>:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas

Electrical and Optical Properties of Amorphous SnO<sub>2</sub>:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas

By reactive magnetron sputtering from a ceramic SnO<sub>2</sub>:Ta target onto unheated substrates, X-ray amorphous SnO<sub>:</sub>Ta films were prepared in gas mixtures of Ar/O<sub>2</sub>(N<sub>2</sub>O, H<sub>2</sub>O). The process windo...

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Bibliographic Details
Main Authors: Rainald Mientus, Michael Weise, Stefan Seeger, Rene Heller, Klaus Ellmer
Format: Article
Language:English
Published: MDPI AG 2020-02-01
Series:Coatings
Subjects:
reactive magnetron sputtering
transparent conductive oxide
electronic transport
doping efficiency
tin dioxide
Online Access:https://www.mdpi.com/2079-6412/10/3/204

Internet

https://www.mdpi.com/2079-6412/10/3/204

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