Electrical and Optical Properties of Amorphous SnO<sub>2</sub>:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas
By reactive magnetron sputtering from a ceramic SnO<sub>2</sub>:Ta target onto unheated substrates, X-ray amorphous SnO<sub>:</sub>Ta films were prepared in gas mixtures of Ar/O<sub>2</sub>(N<sub>2</sub>O, H<sub>2</sub>O). The process windo...
Main Authors: | Rainald Mientus, Michael Weise, Stefan Seeger, Rene Heller, Klaus Ellmer |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-02-01
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Series: | Coatings |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-6412/10/3/204 |
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