Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform th...

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Bibliographic Details
Main Authors: Simas Butkus, Aleksandr Alesenkov, Domas Paipulas, Eugenijus Gaižauskas, Andrius Melninkaitis, Dalia Kaškelytė, Martynas Barkauskas, Valdas Sirutkaitis
Format: Article
Language:English
Published: MDPI AG 2015-12-01
Series:Micromachines
Subjects:
femtosecond ablation
micromachining
light filaments
optimization
shadowgraphy
Online Access:http://www.mdpi.com/2072-666X/6/12/1471

Internet

http://www.mdpi.com/2072-666X/6/12/1471

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