Metallic nanofilms on single crystal silicon: Growth, properties and applications
The metal–silicon thin-film system is not isostructural and furthermore exhibits pronounced interdiffusion and chemical reactions. Therefore the growth of metallic films on silicon leads to a nanosize nonhomogenity of films and a high concentration of defects, especially at interface. The material a...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2017-06-01
|
| Series: | Modern Electronic Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2452177917300609 |