Structural Behavior of a Multi-Layer Based Microbeam Actuator
In this paper, the structural behavior of a micro-electromechanical system (MEMS) composed of two electrically coupled parallel clamped-clamped microbeams is investigated. An Euler Bernoulli beam model is considered along with the nonlinear electric actuating force to get the equation of motion gove...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-08-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2076-0825/5/3/22 |