A SAW Delay Line Sensor Combined with Micro-hotplate for Bio-chemical Applications
This paper presents a SAW delay line sensor for chemical and biological applications. The impulse response model is used for determination of IDT parameters and first order investigation. A three-dimensional finite element model of a SAW delay line on a silicon membrane with an AlN thin film is sim...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2011-02-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/february_2011/P_769.pdf |