A SAW Delay Line Sensor Combined with Micro-hotplate for Bio-chemical Applications
This paper presents a SAW delay line sensor for chemical and biological applications. The impulse response model is used for determination of IDT parameters and first order investigation. A three-dimensional finite element model of a SAW delay line on a silicon membrane with an AlN thin film is sim...
Main Authors: | Babak Vosoughi Lahijani, Habib Badri Ghavifekr |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2011-02-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/february_2011/P_769.pdf |
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