Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime

Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime

We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computat...

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Bibliographic Details
Main Authors: Boris A. Boom, Alessandro Bertolini, Eric Hennes, Johannes F. J. van den Brand
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Sensors
Subjects:
capacitance transducers
free molecular flow
gas damping
Monte Carlo methods
Q measurement
Online Access:https://www.mdpi.com/1424-8220/21/7/2566

Internet

https://www.mdpi.com/1424-8220/21/7/2566

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