Preferential orientation in metal nitride deposited by the UBM system
This work was aimed at studying the influence of ion bombardment on the preferred orientation (OP) of transition metal nitrides (TMN) produced by the reactive sputtering technique with a variable unbalanced magnetron through permanent magnets. Tita- nium nitride (TiN) coatings were thus studied by v...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universidad Nacional de Colombia
2010-01-01
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| Series: | Ingeniería e Investigación |
| Subjects: | |
| Online Access: | https://revistas.unal.edu.co/index.php/ingeinv/article/view/15220 |