Micro-electro-mechanical systems (MEMS): Technology for the 21st century
Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Association of Chemical Engineers of Serbia
2014-01-01
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| Series: | Hemijska Industrija |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/0367-598X/2014/0367-598X1300091D.pdf |