Seebeck Coefficient of SOI Layer Induced by Phonon Transport
The Seebeck coefficient of a patterned Si wire on P-doped SOI (Si-on-insulator) layer with a carrier concentration of 1018 cm-3 was measured near room temperature. The Seebeck coefficient is found to be smaller than that in the SOI layer and to be closer to the calculated Seebeck coefficient includi...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Universitas Indonesia
2015-04-01
|
| Series: | Makara Journal of Technology |
| Subjects: | |
| Online Access: | http://journal.ui.ac.id/technology/journal/article/view/3022 |