Nonvolatile Electrochemical Metallization Memory Based on Nanocrystalline La<sub>2</sub>O<sub>3</sub> Solid Electrolyte Thin Film
Nanocrystalline La<sub>2</sub>O<sub>3</sub> thin films are deposited on Pt/Ti/SiO<sub>2</sub>/Si substrate by reactive radio frequency magnetron sputtering. The Ag/La<sub>2</sub>O<sub>3</sub>/Pt devices exhibit reversible bipolar resistance...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2015-01-01
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Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/7066936/ |