A Dynamic Micro Force Sensing Probe Based on PVDF
Polyvinylidene fluoride (PVDF) membrane structure is presented as micro-force sensor which has potential applications in dynamic amplitude modulation scanning probe microscopy (SPM). Driven by two symmetric aligned PZT actuators near its resonance, the membrane has high force and spatial sensitivity...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2010-03-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/march_2010/P_588.pdf |