Low loss silicon waveguides and grating couplers fabricated using anisotropic wet etching technique
We report low-loss silicon waveguides and efficient grating coupler to couple light into them. By using anisotropic wet etching technique, we reduced the side wall roughness down to 1.2nm. The waveguides were patterned along the [112] direction on a [110] SOI substrate. The waveguide boundaries are...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Frontiers Media S.A.
2016-02-01
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Series: | Frontiers in Materials |
Subjects: | |
Online Access: | http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00010/full |