A Practical Positioning Method in End-Plate Surface Distance Measurement with Nano-Meter Precision
End-plate surface distance is important for length value dissemination in the field of metrology. For the measurement of distance of two surfaces, the positioning method is the key for realizing high precision. A practical method with nanometer positioning precision is introduced in consideration of...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-11-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/9/22/4970 |